Principles of chemical vapor deposition

The outer archives are busy

by Daniel Mark Dobkin, D.M. Dobkin, M.K. Zuraw

About this book

Inside most any semiconductor fabrication facility in the world at any given moment, there are operators and engineers standing in front of machines with shiny stainless steel facades, loading and unloading cassettes of wafers with complex patterns of dopants, defects, and films on their surfaces.

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