Microstereolithography and other fabrication techniques for 3D MEMS

The outer archives are busy

by Vijay Varadan, Xiaoning Jiang, V. V. Varadan

About this book

Microelectromechanical systems (MEMS) refer to a collection of microseconds and actuators that can sense its environment and have the ability to react to changes in that environment with the use of a microcircuit control.

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