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Magical Tome

Cover of Scanning probe lithography
First published
2001
Publisher
Springer
Pages
228 pages
ISBN
9780792373612

Scanning probe lithography

The outer archives are busy

by Hyongsok T. Soh, Kathryn Wilder Guarini, Calvin F. Quate

About this book

Semiconductor lithography is the patterning process used to define the structures that make up integrated circuits (ICs).

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