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Magical Tome

Cover of Microlithography Science and Technology
First published
1998
Publisher
CRC
Pages
800 pages
ISBN
9780824799533

Microlithography Science and Technology

The outer archives are busy

by James R. Sheats

About this book

Microlithography is a manufacturing process for producing highly accurate, microscopic, two-dimensional patterns in a photosensitive resist material.

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