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Magical Tome

Cover of Pvd for Microelectronics
First published
1998
Publisher
Academic Press
Pages
419 pages
ISBN
9780125330268

Pvd for Microelectronics

The outer archives are busy

by Ronald A. Powell

About this book

The physical process tat we now call sputtering was first reported in 1852 by Sir William Robert Grove [1.1], who described the effect as "cathodic disintegration."

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