Microelectromechanical SystemsFrank W. DelRio, Maarten P. de Boer, Christoph Eberl, Evgeni Gusev · First published 2014Open the Tome
MEMS, BioMEMS and Bioelectronics - Materials and DevicesTim Albrecht, Maarten P. de Boer, Frank W. DelRio, Mehmet R. Dokmeci, Christoph Eberl · First published 2012Open the Tome
