Handbook for Cleaning for Semiconductor ManufacturingKaren A. Reinhardt, Richard F. Reidy · First published 2011Open the Tome
Handbook of cleaning for semiconductor manufacturingKaren A. Reinhardt, Richard F. Reidy · First published 2011Open the Tome
Handbook of silicon wafer cleaning technologyKaren A. Reinhardt, Kern, Werner · First published 2008Open the Tome
