Cost and performance in integrated circuit creationAlfred Kwok-Kit Wong, Kevin M. Monahan · First published 2003Open the Tome
Handbook of critical dimension metrology and process controlKevin M. Monahan · First published 1994Open the Tome
Integrated Circuit Metrology, Inspection, and Process Control IIIKevin M. Monahan · First published 1989Open the Tome
Integrated Circuit Metrology, Inspection and Process Control II (Spie, Vol 921)Kevin M. Monahan · First published 1988Open the Tome
Integrated Circuit Metrology, Inspection, and Process ControlKevin M. Monahan · First published 1987Open the Tome
Micron and submicron integrated circuit metrologyKevin M. Monahan · First published 1985Open the Tome
