Ion-solid interactions for materials modification and processingDavid B. Poker, Dayush Ila, Yang-Tse Cheng, Lloyd R. Harriott, Thomas W. Sigmon · First published 1996Open the Tome
Beam Solid Interactions: Fundamentals and ApplicationsLloyd R. Harriott · First published 1993Open the Tome
Advanced techniques for integrated circuit processingLloyd R. Harriott · First published 1991Open the Tome
