Chemical-mechanical polishing of low dielectric constant polymers and organosilicate glassesChristopher L. Borst, Christopher Lyle Borst, William N. Gill, Ronald J. Gutmann · First published 2002Open the Tome
Copper-fundamental mechanisms for microelectronic applicationsS. P Murarka, Shyam P. Murarka, Igor V. Verner, Ronald J. Gutmann · First published 2000Open the Tome
