Materials Science of Microelectromechanical Systems Devices IVArturo A. Ayón, Thomas E. Buchheit, Harold Kahn, S. Mark Spearing · First published 2014Open the Tome
Nano and Microelectromechanical Systems (NEMS and MEMS) and Molecular MachinesDavid A. LaVan, Arturo A. Ayón, Thomas E. Buchheit, Marc J. Madou · First published 2003Open the Tome
