Sensors, Fundamentals and General AspectsThomas Grandke, Wen H. Ko, Wolfgang Göpel, Joachim Hesse, J. N. Zemel · First published 2008Open the Tome
Fundamentals and General AspectsWolfgang Göpel, Thomas Grandke, Wen H. Ko, Joachim Hesse, J. N. Zemel · First published 1989Open the Tome
Micromachining and micropackaging of transducersWen H. Ko, David G. Fleming · First published 1985Open the Tome