Electronic Material Science and Surfaces, Interfaces, and Thin Films for MicroelectronicsEugene A. Irene · First published 2008Open the Tome
Surfaces, Interfaces, and Films for MicroelectronicsEugene A. Irene · First published 2008Open the Tome
Surface chemical cleaning and passivation for semiconductor processingGregg S. Higashi, Eugene A. Irene · First published 1993Open the Tome