Science and Technology of Semiconductor Surface PreparationGregg S. Higashi · First published 1997Open the Tome
Surface chemical cleaning and passivation for semiconductor processingGregg S. Higashi, Eugene A. Irene · First published 1993Open the Tome
Laser and particle-beam chemical processing for microelectronicsDaniel J. Ehrlich, Gregg S. Higashi · First published 1988Open the Tome
